In this paper, we present a new tool developed for environmental testing of MEMS: the EMA (Environmental MEMS Analyzer) 3D. Based on white light profilometry coupled with an environmental chamber, it permits large temperature scale and different pressure testing. This system has been used to characterize the environmental behavior of two types of RF MEMS, from −20 to 200°C.
Environmental Chamber for Temperature and Pressure Investigations on MEMS Devices
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Lellouchi, D, Gauffier, J, Lafontan, X, Pons, P, Schmitt, P, Pressecq, F, & Dhennin, J. "Environmental Chamber for Temperature and Pressure Investigations on MEMS Devices." Proceedings of the CANEUS 2006: MNT for Aerospace Applications. CANEUS2006: MNT for Aerospace Applications. Toulouse, France. August 27–September 1, 2006. pp. 275-279. ASME. https://doi.org/10.1115/CANEUS2006-11026
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