The transient thermal deformations of laser water-cooled mirror surface with minichannels have been numerically studied. The theoretical results show that fluid flow has a great influence on temperature distribution and thermal deformation. The maximum of temperature and thermal deformation appear in the downstream area, which is different from the previous research results. Meanwhile, experiments with different working conditions are conducted to validate the numerical simulation, and the numerical results agree well with the experimental data. The emulation method of thermal deformation of water-cooled mirror used in this study is proved to be effective research method.

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