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Keywords: heated microcantilever
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Proceedings Papers

Proc. ASME. HT2007, ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference, Volume 2, 805-815, July 8–12, 2007
Paper No: HT2007-32536
... 07 04 2009 This paper describes the heat transfer from a heated microcantilever to the substrate and the resultant temperature distributions. A four-point probe platinum resistive thermometer having a 140 nm lateral resolution has been fabricated on the SiO 2 -coated silicon substrate...