When developing linear micro motors, the synchronous drive scheme is well suited since it offers relatively high driving forces while keeping the design, fabrication, and assembly relatively simple. After the feasibility of the application of the synchronous drive scheme in a micro motor was proven, a smaller version of the motor was developed to investigate this drive scheme’s miniaturization potential. Apart from scaling down the motor dimensions, further optimizations were applied using the results of FEM simulations. The micro motor was fabricated, assembled, and successfully tested. The results demonstrate that the synchronous linear micro motor was successfully scaled down. Furthermore, the results indicate that even a further miniaturization seems feasible.

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