Thin film of YSZ electrolyte is highly desired to reduce the electrical resistance in SOFCs. YSZ thin Films have been successfully produced using liquid fuel combustion chemical vapor deposition (CCVD) technique. Nucleation of the YSZ particles were investigated based on two processing parameters, i.e., substrate temperature and total-metal-concentration in the liquid fuel. An optimum substrate temperature was found for highest the nucleation density. The nucleation density was increased with the total-metal-concentration. Microstructure evolution of the YSZ particles in the early stage in film growth was also studied. It was found that the particle growth rate was linear with processing time, and the particle orientation was varying with the time in the early stage of the film processing. To enhance the film growth rate, the effect of thermophoresis was studied. By increase the temperature gradient towards substrate, the effect of thermophoresis was enhanced and the film growth is also increased.
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Deposition of YSZ Thin Films by Liquid Fuel Combustion Chemical Vapor Deposition
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Xu, Z, Sankar, J, Wei, Q, Lua, J, Yamolenko, S, & Pai, D. "Deposition of YSZ Thin Films by Liquid Fuel Combustion Chemical Vapor Deposition." Proceedings of the ASME 2002 International Mechanical Engineering Congress and Exposition. Materials: Processing, Characterization and Modeling of Novel Nano-Engineered and Surface Engineered Materials. New Orleans, Louisiana, USA. November 17–22, 2002. pp. 281-289. ASME. https://doi.org/10.1115/IMECE2002-39368
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