Many manufacturing devices must execute motions as quickly as possible to achieve profitable high-volume production. This paper develops a control strategy that combines feedforward and feedback control with command shaping. First, the feedback controller is designed to increase damping and eliminate steady-state error. Next, the feedforward controller is designed to speed up the transient response. Finally, an appropriate reference profile is generated using command-shaping techniques to ensure fast point-to-point motions with minimum residual vibration. The particular focus of the paper is to understand the interactions between these individual control components. The resulting control strategy is demonstrated on a model of a high-speed semiconductor manufacturing machine.
Effective Feedforward/Feedback Controller Design With Command Shaping to Reduce Residual Vibration
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Meckl, PH, & Shin, YJ. "Effective Feedforward/Feedback Controller Design With Command Shaping to Reduce Residual Vibration." Proceedings of the ASME 2003 International Mechanical Engineering Congress and Exposition. Manufacturing. Washington, DC, USA. November 15–21, 2003. pp. 541-548. ASME. https://doi.org/10.1115/IMECE2003-42797
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