In this work, we introduce the simulation design and microfabrication of a class of magnetic metamaterials with critical dimension of 2–6 microns and lattice constant of 30–50 microns. These metamaterials will exhibit magnetic response at 0.5–2THz. To optimize the design variables, we conducted a series of Taguchi experiments and a quasi-linear relationship of resonant frequency is established upon each design parameter. We are currently characterizing the first generation of the fabricated magnetic metamaterials using Fourier Transformed Infrared spectroscopy.

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