Numerical Modeling of a Nonlinear MEMS Membrane

A numerical model is developed to understand the behavior of a laminated, piezoelectric, geometrically nonlinear MEMS device. The finite difference method is chosen, along with the Newmark technique to model the static and vibrational behavior. This technique is validated by comparison to empirical data. The developed model is exercised to understand and optimize the device by studying residual stress, layer thicknesses, and electrode sizes with the goal of reduction of fundamental frequency and increase of charge output.