A novel self-aligned lithographic technique has been developed to overcome difficulties in forming a high resolution, high aspect-ratio electroforming in polymer molds. This technique is capable of building a micro coil device with high-density, high aspect-ratio features, which is useful for magnetic actuator applications. The relatively straightforward technique has excellent potential for scaling to batch manufacturing.
A Novel Self-Aligned Microcoil Formation for Magnetic Actuator Applications
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Chang, H, Lin, J, Chang, R, Lin, P, Bachman, M, Reinicke, B, Barbarits, J, & Li, GP. "A Novel Self-Aligned Microcoil Formation for Magnetic Actuator Applications." Proceedings of the ASME 2004 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Anaheim, California, USA. November 13–19, 2004. pp. 63-67. ASME. https://doi.org/10.1115/IMECE2004-62288
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