This paper presents the fabrication of ITO nanofibers as gas sensor. ITO nanofibers are fabricated by electrospinning process. Sensors based on ITO nanofibers were prepared on Si substrate and silver paste was used as electrode. The morphology and crystal structure of ITO nanofibers were studied by SEM and XRD, respectively. The optimal working temperature and sensitivity of ITO nanofiber sensors were investigated. The sensitivity of ITO nanofiber sensor has been found to increase to a peak of 9.8 at 160°C for 50 ppm NO2, which suggests that ITO nanofibers sensor provides significantly better sensitivity for NO2 at lower temperature.

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