Key mechanical requirements for advanced Hard Disk Drive (HDD) recording heads are a minimal flying height and a perfect track following. By applying Micro Electro-mechanical Micro Systems (MEMS) technology, a Slider with an Integrated Microactuator (SLIM) enabling both in a cost competitive way was created. This paper describes the fabrication process for the system’s electromagnetic microatuator and emphasizes the technology enhancements achieved after a process redesign.

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