In this paper, we present new variation analysis features added to SugarCube. SugarCube is a novice-friendly online CAD tool for exploring the design space of compact MEMS models. Such variation analysis can help to evaluate the bounded effects of unavoidable process variations during the fabrication (such as Young’s modulus, overcut, gap asymmetry, etc.), packaging (such as variations in temperature, expansion coefficients, etc.), and operation (such as variations in voltage sources, etc.). Compared to other software tools for MEMS, the benefits of variation analysis in SugarCube include its comprehensiveness, ease of use, speed, and accessibility. In SugarCube, any geometric, material, or excitation parameter may be easily explored for its effect on device performance. Such analysis is expected to benefit feasibility analyses on process survivability, process yield, and operational robustness. For a couple of test cases, we perform our variation analysis on a micro-scale accelerometer and gyroscope.
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ASME 2012 International Mechanical Engineering Congress and Exposition
November 9–15, 2012
Houston, Texas, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-4525-7
PROCEEDINGS PAPER
Variation Analyses Using SugarCube
Jason V. Clark
Jason V. Clark
Purdue University, West Lafayette, IN
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Xing Jin
Purdue University, West Lafayette, IN
Jason V. Clark
Purdue University, West Lafayette, IN
Paper No:
IMECE2012-89745, pp. 257-262; 6 pages
Published Online:
October 8, 2013
Citation
Jin, X, & Clark, JV. "Variation Analyses Using SugarCube." Proceedings of the ASME 2012 International Mechanical Engineering Congress and Exposition. Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B. Houston, Texas, USA. November 9–15, 2012. pp. 257-262. ASME. https://doi.org/10.1115/IMECE2012-89745
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