The paper reports on the experimental studies targeting Knudsen forces on silicon microcantilevers. The devices were fabricated on a Silicon-On-Insulator wafer with one end anchored to the substrate. Measurements were performed through direct external heating of the underlying substrate. Device deflection was quantified using confocal microscopy, showing an increase in force magnitude for decreasing Knudsen number. Measurements were carried out at a constant substrate temperature with Knudsen number being controlled directly via ambient pressure.

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