National Science Foundation funding was obtained to nucleate nanotechnology curriculum and start a senior-level nanotechnology course cross-listed in the Mechanical Engineering and Electrical Engineering department. The key components are implementation of lectures integrated with hands-on laboratory experience, research seminar and evaluation. Laboratory projects of nanofabrication include metal-oxide-semiconductor capacitor and nano-structured solar cell for undergraduate and graduate students respectively. The assessment of course materials and master’s understanding was evaluated by surveys and direct observations of student performance. In spring 2020, statistical data from survey demonstrated that graduate students responded overall high rate for all of the course materials and undergraduate students gave high rate for majority of course materials except thermal evaporation fabrication project. A significant standard deviation for rating of thermal evaporation fabrication process indicated that practical engineering projects are challenging for some undergraduate students.

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