Abstract

In this paper, a selective optical absorber plate and an anodic oxidation alumina are proposed for the rotor of an opto microactuator used as an actuator in a micromachine. The thin films of the selective optical absorber plate are fabricated by vacuum deposition. The substrates used are pyrex glass at the first stage and aluminum at the second stage. Deposition on the pyrex glass substrates is carried out in order to estimate the deposition rate and determine the characteristics of the deposited films. Germanium and silicon oxide are selected as the materials for the selective optical absorber thin films. Germanium is used as to absorb the visible beam from a laser generator. In contrast, silicon oxide is used because it has a small reflectance for visible light. The selective optical absorber-plates for the rotors of the opto microactuator consist of aluminum substrates on which germanium thin films and silicon oxide thin films are deposited. A germanium film is deposited on an aluminum substrate first and then a silicon film is deposited on the germanium film. Therefore, the rotor surface has a small reflectance for visible light and a large reflectance for infrared light. The surface with the deposited films is called the front surface and the opposite surface is called a rear surface. The rear surface is an aluminum plate with the anodic oxidation alumina film for low heat conductivity, large emissivity and thermal insulation. The insulated rotors can keep the temperature difference by greater than 10 Kelvin, even if the irradiation times are longer than 200 seconds. There are 3 reasons why the insulating rotor can keep the temperature difference. They are occurrence of a contact resistance, an increase of a surface area and a small heat conductivity of anodic oxidation alumina.

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