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Proceedings Papers

A Triangular Frequency-Tuning Comb Array

Ki Bang Lee, Young-Ho Cho
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 127-131, November 16–21, 1997
Paper No: IMECE1997-0950
DOI: https://doi.org/10.1115/IMECE1997-0950
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Topics: Damping, Manufacturing, Microfabrication, Micromachining, Micromechanical resonators, Pressure, Resonance, Shapes
Proceedings Papers

Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates

Zhimin J. Yao, Chuck Goldsmith, Susan Eshelman, David Denniston
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 69-73, November 16–21, 1997
Paper No: IMECE1997-0941
DOI: https://doi.org/10.1115/IMECE1997-0941
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Topics: Cantilevers, Design, Electrical resistivity, Manufacturing, Membranes, Metals, Micromachining, Microwaves, Signals, Silicon
Proceedings Papers

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

Mu Chiao, Liwei Lin
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 75-80, November 16–21, 1997
Paper No: IMECE1997-0942
DOI: https://doi.org/10.1115/IMECE1997-0942
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Topics: Microactuators, Microbeams, Computers, Displacement, Image processing, Micromachining, Polysilicon, Thermoelasticity
Proceedings Papers

MEMS for Fluidic Controls

Chih-Ming Ho, Yu-Chong Tai
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 27, November 16–21, 1997
Paper No: IMECE1997-0934
DOI: https://doi.org/10.1115/IMECE1997-0934
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Topics: Microelectromechanical systems, Sensors, Actuators, Circuits, Shear stress, Transducers, Computers, Integrated circuit fabrication, Micromachining, Artificial neural networks
Proceedings Papers

A Lateral Repulsive-Force Drive Using Asymmetric Electrostatic Field

Ki Bang Lee, Young-Ho Cho
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 81-85, November 16–21, 1997
Paper No: IMECE1997-0943
DOI: https://doi.org/10.1115/IMECE1997-0943
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Topics: Atmospheric pressure, Displacement, Electric fields, Electrodes, Electromagnetic induction, Finite element analysis, Microactuators, Micromachining, Polysilicon, Resonance
Proceedings Papers

Characterization of Thin-Film Impact Microactuators

Roger L. Hipwell, Richard S. Muller, Albert P. Pisano
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 87-91, November 16–21, 1997
Paper No: IMECE1997-0944
DOI: https://doi.org/10.1115/IMECE1997-0944
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Topics: Microactuators, Thin films, Actuators, Design, Displacement, Impulse (Physics), Micromachining, Microscale devices, Momentum
Proceedings Papers

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

C. H. Liu, J. K. Reynolds, A. Partridge, J. D. Grade, A. M. Barzilai, T. W. Kenny, H. K. Rockstad
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 13-20, November 16–21, 1997
Paper No: IMECE1997-0932
DOI: https://doi.org/10.1115/IMECE1997-0932
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Topics: Accelerometers, Electrons, Micromachining, Transducers, Tunnel construction, Resonance, Silicon, Acoustics, Design, Manufacturing
Proceedings Papers

Strength and Fracture of Micromachined Silicon Structures

Wan Suwito, Martin L. Dunn, Shawn J. Cunningham
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 99-104, November 16–21, 1997
Paper No: IMECE1997-0946
DOI: https://doi.org/10.1115/IMECE1997-0946
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Topics: Fracture (Materials), Fracture (Process), Micromachining, Silicon, Corners (Structural elements), Design, Anisotropy, Chemical etching, Crystals, Manufacturing
Proceedings Papers

Design, Fabrication and Static Test of a Resonant Microaccelerometer

Si Young Kim, Jeung Sang Go, Young-Ho Cho
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 21-26, November 16–21, 1997
Paper No: IMECE1997-0933
DOI: https://doi.org/10.1115/IMECE1997-0933
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Topics: Design, Manufacturing, Resonance, Accelerometers, Micromachining, Polysilicon, Stress, Annealing, Deflection, Mechanical structures
Proceedings Papers

The Present and Future of Micromachining in Industrial Production of Surgical Tools

M. J. Tolkoff
Proc. ASME. IMECE97, Advances in Bioengineering, 289, November 16–21, 1997
Paper No: IMECE1997-0342
DOI: https://doi.org/10.1115/IMECE1997-0342
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Topics: Micromachining, Surgical tools, Biological tissues, Engineers, Maintenance, Valves, Biology, Blood vessels, Bridges (Structures), Carbon dioxide
Proceedings Papers

A Micromachined Device to Measure Subcellular Traction Forces

Catherine G. Galbraith, Michael P. Sheetz
Proc. ASME. IMECE97, Advances in Bioengineering, 167-168, November 16–21, 1997
Paper No: IMECE1997-0281
DOI: https://doi.org/10.1115/IMECE1997-0281
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Topics: Micromachining, Traction, Adhesion, Tissue engineering
Proceedings Papers

Design, Fabrication and Uncertainty Evaluation of a Surface-Micromachined Capacitive Microaccelerometer

Ki-Ho Han, Jong-Pal Kim, Young-Ho Cho
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 347-352, November 15–20, 1998
Paper No: IMECE1998-1266
DOI: https://doi.org/10.1115/IMECE1998-1266
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Topics: Design, Manufacturing, Micromachining, Uncertainty, Accelerometers, Capacitance, Electrodes, Resonance, Circuits, Engineering prototypes
Proceedings Papers

Integrated Modeling and Testing of a Micro Hinged Structure for Sliding Friction Measurement

James M. Redmond, Maarten P. de Boer, Terry A. Michalske
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 305-311, November 15–20, 1998
Paper No: IMECE1998-1259
DOI: https://doi.org/10.1115/IMECE1998-1259
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Topics: Modeling, Sliding friction, Testing, Friction, Design, Excitation, Bending (Stress), Computer simulation, Cycles, Deflection
Proceedings Papers

Computer-Aided Micro-Mechanism Design

Elisha Sacks, James Allen
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 313-316, November 15–20, 1998
Paper No: IMECE1998-1260
DOI: https://doi.org/10.1115/IMECE1998-1260
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Topics: Computer-aided engineering, Design, Micromechanical devices, Computer software, Kinematics, Space, Computer-aided design, Gears, Geometry, Micromachining
Proceedings Papers

3-Way Microvalve for Pneumatic Applications Fabricated by Silicon Micromachining

Stephan Messner, Martin Müller, Jochen Schaible, Hermann Sandmaier, Roland Zengerle
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 159-164, November 15–20, 1998
Paper No: IMECE1998-1237
DOI: https://doi.org/10.1115/IMECE1998-1237
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Topics: Design, Dimensions, Energy consumption, Flow (Dynamics), Manufacturing, Micromachining, Silicon, Temperature, Valves
Proceedings Papers

Microfluidics of a Planar Microfabricated Fluid Filter

Yit-shun Leung Ki, Didier Maillefer, Gilles Rey-Mermet, Peter A. Monkewitz, Philippe Renaud, Harald T. G. van Lintel
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 165-170, November 15–20, 1998
Paper No: IMECE1998-1238
DOI: https://doi.org/10.1115/IMECE1998-1238
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Topics: Filters, Fluids, Microfabrication, Microfluidics, Design, Filtration, Flow (Dynamics), Micromachining, Pumps, Silicon
Proceedings Papers

An 8x8 Robust Capacitive Pressure Sensor Array

Sung-Pil Chang, Jeong-Bong Lee, Mark G. Allen
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 513-517, November 15–20, 1998
Paper No: IMECE1998-1293
DOI: https://doi.org/10.1115/IMECE1998-1293
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Topics: Pressure sensors, Micromachining, Sensors, Manufacturing, Stainless steel, Capacitance, Design, Electrodes, Flow (Dynamics), Lamination
Proceedings Papers

Fracture and Sub-Critical Crack Growth Behavior of Micromachined Single Crystal Silicon Structures

Alissa M. Fitzgerald, R. Suryanarayanan Iyer, Reinhold H. Dauskardt, Thomas W. Kenny
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 395-399, November 15–20, 1998
Paper No: IMECE1998-1275
DOI: https://doi.org/10.1115/IMECE1998-1275
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Topics: Crystals, Fracture (Materials), Micromachining, Silicon, Stress, Electrical resistance, Geometry
Proceedings Papers

Mechanical Optimization of a Dual-Axis Piezoresistive Force Sensor

Yiching Liang, Thomas Kenny
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 389-394, November 15–20, 1998
Paper No: IMECE1998-1274
DOI: https://doi.org/10.1115/IMECE1998-1274
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Topics: Atomic force microscopy, Cantilevers, Data storage systems, Deflection, Force sensors, Imaging, Ion implantation, Mechanical behavior, Micromachining, Optimization
Proceedings Papers

Collection of Airborne Bacteria With Micro-Machined Virtual Impactor Arrays

Vanessa M. Kenning, Charles J. Call, Patrick T. Call, Joseph G. Birmingham
Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 111-116, November 15–20, 1998
Paper No: IMECE1998-1230
DOI: https://doi.org/10.1115/IMECE1998-1230
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Topics: Bacteria, Micromachining, Particulate matter, Flow (Dynamics), Surface roughness, Turbulence, Computational fluid dynamics, Design, Engineering simulation, Inertia (Mechanics)