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Keywords: Magnetic ActuatorClose
Hung-Pin Chang, Jason Lin, Ruisheng Chang, Puo-Han Lin, Mark Bachman, Bob Reinicke, Joe Barbarits, G. P. Li
Proc. ASME. IMECE2004, Microelectromechanical Systems, 63-67, November 13–19, 2004
Paper No: IMECE2004-62288
..., which is useful for magnetic actuator applications. The relatively straightforward technique has excellent potential for scaling to batch manufacturing. Self-Aligned High-density High aspect-ratio SU-8 MicroCoil Magnetic Actuator OC n o There is a growing demand in using micro-coils...