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Keywords: Thermal microactuators
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Proceedings Papers

Proc. ASME. IMECE2004, Microelectromechanical Systems, 427-432, November 13–19, 2004
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2004-59616
...% precision interval is ±14 nm. The open-loop repeatabilities observed in these tests indicate that the TIM is suitable for nanopositioning, and even better performance is anticipated with the implementation of feedback control. Thermal microactuators nanopositioning accuracy precision repeatability...