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Keywords: nanopositioning
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Proceedings Papers

Proc. ASME. IMECE2010, Volume 3: Design and Manufacturing, Parts A and B, 709-718, November 12–18, 2010
Paper No: IMECE2010-37794
... 01 05 2012 A high natural frequency (open-loop bandwidth) is a critical requirement for nanopositioners in high-throughput nanomanufacturing and nano-metrology applications. This paper presents the design and analysis of a high-bandwidth nanopositioning XY stage. The monolithic stage...
Proceedings Papers

Proc. ASME. IMECE2007, Volume 9: Mechanical Systems and Control, Parts A, B, and C, 1119-1127, November 11–15, 2007
Paper No: IMECE2007-41834
... 26 05 2009 This paper presents improved empirical representations of a general class of open-loop unstable systems using closed-loop system identification. A multi-axis magnetic-levitation (maglev) nanopositioning system with an extended translational travel range is used as a test bed...
Proceedings Papers

Proc. ASME. IMECE2004, Microelectromechanical Systems, 427-432, November 13–19, 2004
Paper No: IMECE2004-59616
... 31 03 2008 Microactuators are increasingly being applied to nanometer-accurate position control. The purpose of this paper is to investigate the feasibility of using the thermomechanical in-plane microactuator (TIM) in nanopositioning applications. The TIM is a class of thermal...
Proceedings Papers

Proc. ASME. IMECE2005, Microelectromechanical Systems, 561-568, November 5–11, 2005
Paper No: IMECE2005-82158
... 28 01 2008 Several micro-scale nanopositioning mechanisms, or MEMS nanopositioners, have been developed for application in nanotechnology and optical sensors. In this paper, the design and modeling of these devices is presented along with initial experimental results. The MEMS...