The forced liquid jet two-phase impinging cooling with surface enhancement will ensure that the liquid is replenished at the wick, delaying surface drying out and enhancing the maximum operational heat flux of the cooler. We developed a two-phase jet cooler with micro pin fin which can achieve very low chip-to-coolant resistance while significantly reducing the power consumption for a cooling system due to very low flow rate requirements. For a targeted heat flux of 400 W/cm2, we demonstrated a chip-to-coolant thermal resistance of 0.080 cm2-°C/W with a flow rate of 50 g/min and associated pressure drop of 1.11 kPa using an active pumping system. Moreover, the pressure drop inside the manifold is precisely monitored using our dedicated test structure inside the manifold. This study is the first to capture the temporal fluctuations of the pressure drop between the inlet and outlet of the jet manifold under various heat flux inputs and flow rates. Our outlet pressure condition measurements suggest that significant pressure fluctuations in the boiling chamber resulting from the bubble movement in the elongated tubing is detrimental to the boiling performance.

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