In this paper, a computational study of a novel nanomachining process, Vibration Assisted Nano Impact machining by Loose Abrasives (VANILA), is conducted using the commercial FEM software package ABAQUS. In this novel nanomachining process, an atomic force microscope (AFM) is utilized as a platform and the nano abrasives are injected in the slurry which is located between the workpiece and the vibrating AFM probe. These nano abrasives impact the workpiece and result in nanoscale material removal. In this research, diamond particles are used as loose abrasives and the ductile mode machining is used to describe the behavior of the brittle silicon workpiece. This study aims to investigate the effects of operating temperature and number of multiple impact hits on material removal mechanism of VANILA process. The impact speed of the loose abrasives is kept constant at 200 m/s and the impact angle is fixed at 90°. The frictional coefficient during the machining is considered to be 0.05. The material removal mechanism at various operating temperatures (20°C, 100°C, 200°C, 400°C, 600°C, and 800°C) and multiple impacts are tested. It is found that the operating temperature and number of impact hits have substantial influence on material removal volume in the VANILA process.

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