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Keywords: co-planar driving mechanism
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Proceedings Papers

Proc. ASME. MSEC2020, Volume 2: Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T08A023, September 3, 2020
Paper No: MSEC2020-8520
.... The accuracy calibration results showed the machine can reach a positioning accuracy of 800nm. micro machine tool high resolution volumetric error error analysis co-planar driving mechanism ACCURACY ANALYSIS OF THE MICRO MACHINE TOOL WITH CO-PLANAR DRIVING MECHANISM Shih-Ming Wang1, Zhe-Zhi Ye2...