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Keywords: high resolution
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Proceedings Papers

Proc. ASME. MSEC2020, Volume 2: Manufacturing Processes; Manufacturing Systems; Nano/Micro/Meso Manufacturing; Quality and Reliability, V002T08A023, September 3, 2020
Paper No: MSEC2020-8520
... control, accuracy optimization analysis for a low-cost and high-accuracy micro machine tool with a multi-DOF platform with co-plane synchronously-driving mechanism. Due to the advantages of the mechanism, the machine will be able to have high resolution and high accuracy without use of expensive drive...