This article addresses the optimal (minimal input energy) design of scan trajectories, which is important in applications such as the imaging and manipulation of nano-scale surface phenomena using scanning tunneling microscopes (STM), MEMS-based micro-scanners, quick-return mechanisms and cams used in manufacturing, and general repeating processes. The contribution of this article is the systematic solution of the optimal scan-trajectory design problem. As opposed to existing techniques that require pre-specification of the desired output trajectory (such prespecifications can be ad hoc), the optimal output trajectory is found as a result of the proposed input-energy minimization approach. In this sense, the proposed approach leads to a systematic solution of the optimal output-trajectory-design problem. The proposed optimal scanning method is applied to an experimental scanning tunneling microscope; simulation and experimental results are presented to illustrate the efficacy of the proposed approach to design optimal scan-trajectories.
Design and Control of Optimal Scan Trajectories: Scanning Tunneling Microscope Example
Contributed by the Dynamic Systems, Measurement, and Control Division of THE AMERICAN SOCIETY OF MECHANICAL ENGINEERS for publication in the ASME JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received by the ASME Dynamic Systems and Control Division March 12, 2002; final revision May 12, 2003. Associate Editor: Ranjan Mukherjee.
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Perez, H., Zou, Q., and Devasia, S. (April 12, 2004). "Design and Control of Optimal Scan Trajectories: Scanning Tunneling Microscope Example ." ASME. J. Dyn. Sys., Meas., Control. March 2004; 126(1): 187–197. https://doi.org/10.1115/1.1636770
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