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Keywords: light interferometers
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. November 2007, 129(6): 777–785.
Published Online: January 23, 2007
... and precisely position an additional payload of 2 kg . Its potential applications include semiconductor manufacturing, microfabrication and assembly, nanoscale profiling, and nanoindentation. actuators assembling capacitive sensors light interferometers magnetic levitation nanotechnology permanent...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. June 2002, 124(2): 297–302.
Published Online: May 10, 2002
... Editor: C. Rahn. 01 July 2000 10 05 2002 shape control mirrors finite element analysis adaptive optics least squares approximations physical instrumentation control MIMO systems optical control wavefront sensors light interferometers Over the past four decades...
