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Keywords: lithography
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. June 2006, 128(2): 204–215.
Published Online: April 4, 2005
... robust control integrated circuit technology position control lithography feedforward control system synthesis servomechanisms linear programming linear matrix inequalities transfer functions time-domain analysis feedforward control robust control servo systems motion control linear...