The incorporation of a micro copper pillar is considered as the major interconnection method in three-dimensional (3D) integrated circuit (IC) intergradation under high-density I/O conditions. To achieve low-temperature bonding, this study investigated the thermosonic flip chip bonding of a copper pillar with a tin cap. The effect of bonding force on bonding strength was studied, and an average bonding strength 2500 g (approximately 84.8 MPa) was obtained in 2 s, at an optimized bonding force of 0.11 N per 40 μm pillar bump, and substrate temperature of 200 °C. Additionally, the effect of the bonding force on bonding interface microstructure and intermetallic compounds (IMCs) was also investigated. Tin whiskers were also observed at the bonding interface at low bonding forces.
Issue Section:
Technical Brief
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