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Keywords: microelectromechanical systems (MEMS)
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Journal Articles
Journal:
Journal of Electronic Packaging
Publisher: ASME
Article Type: Research-Article
J. Electron. Packag. March 2020, 142(1): 011005.
Paper No: EP-19-1027
Published Online: September 19, 2019
...Chia-Cheng Chang; Kuo-Ning Chiang Many microelectromechanical systems (MEMS) devices generate large deflections and stresses under some severe loads, and this cumulative stress often causes structural fatigue when applying high cyclic loads. It affects the reliability and quality of the product...
