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Keywords: silicon on insulator (SOI)
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Journal Articles
Journal:
Journal of Electronic Packaging
Publisher: ASME
Article Type: Research-Article
J. Electron. Packag. March 2020, 142(1): 011005.
Paper No: EP-19-1027
Published Online: September 19, 2019
... coupling simulations was developed and applied to analyze the effects of frequency under HCF testing. The test structures were fabricated using silicon-on-insulator (SOI) MEMS technique and these test structures were used to validate empirical life prediction equation developed in this research...
