High precision surfaces exhibit prominent capabilities for enhancing the imaging quality, expanding the visibility of equipment, simplifying structures, and reducing total costs of optical systems. Hence, they are regarded as essential optical surfaces for replacing traditional elements to modify optical systems, including space systems, optical inspection systems, and smart devices.
Single point diamond turning (SPDT) and ultra-precision grinding have been adopted preliminarily to manufacture high-quality elements. However, these processes create sub-surface damage and tool marks on the work surface. To meet performance requirements, polishing is critical for post-processing to improve the quality of the products.
MCF (Magnetic Compound Fluid) polishing, which is one of polishing methods using magnetic fields, is a processing method for finishing hard and brittle materials with high accuracy. Previous research has shown that MCF polishing is effective for hard and brittle materials. However, despite the high cost of the magnetic fluid that is a component of the MCF slurry, the MCF slurry used for polishing has been discarded. Another major issue was that unused MCF slurry could not be used due to drying. The purpose of this study is to recycle MCF slurry to solve this problem, and to develop high precision finishing technology. Therefore, in this study, a novel MCF polishing method using ultrasonic atomization is proposed, and the effects of α-cellulose on the MCF polishing are investigated. In addition, in order to make it possible to reuse the MCF slurry, In addition, experiments are conducted to enable reuse of MCF slurry.