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Keywords: confocal chromatic probe
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Proceedings Papers

Proc. ASME. LEMP2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, V001T08A011, September 3, 2020
Paper No: LEMP2020-8564
... on-machine measurement ultraprecision machine tool confocal chromatic probe Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness...