A newly developed apparatus that can afford fine displacement and angle is reported here. The characteristics of this is to make use of elastic deformation and to be manufactured as firmly as possible in a solid structure. The experimental results show that adjusting rectilinear displacement can be set within 0.01 μm, and this apparatus can perform paralleled movement of 4 μm displacement within 0.01 seconds of arc, moreover can set the given angles, for example 1.0, 0.5 and 0.2 seconds of arc correctly and easily.
Issue Section:Research Papers
Topics:Displacement, Instrumentation, Deformation
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