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Journal Articles

Nanomachining of Silicon Surface Using Atomic Force Microscope With Diamond Tip

Noritaka Kawasegi, Noboru Takano, Daisuke Oka, Noboru Morita, Shigeru Yamada, Kazutaka Kanda, Shigeto Takano, Tsutomu Obata, Kiwamu Ashida
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2006, 128(3): 723–729.
https://doi.org/10.1115/1.2163364
Published Online: November 23, 2005
...Noritaka Kawasegi; Noboru Takano; Daisuke Oka; Noboru Morita; Shigeru Yamada; Kazutaka Kanda; Shigeto Takano; Tsutomu Obata; Kiwamu Ashida This paper investigates nanomachining of single-crystal silicon using an atomic force microscope with a diamond-tip cantilever. To enable nanomachining...
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Topics: Atomic force microscopy, Cantilevers, Diamonds, Machining, Silicon, Crystals, Wear resistance, Chemical vapor deposition, Photolithography, Cutting