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Keywords: hard discsClose
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2001, 123(3): 445–452.
Published Online: April 1, 2000
..., experimental setups and results from a prototype grating interferometer design are presented and discussed to demonstrate the feasibility of the grating interferometer measurement system. angular measurement light interferometers hard discs actuators position control optical sensors...