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Keywords: nanoimprint lithography
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. December 2013, 135(6): 064501.
Paper No: MANU-13-1184
Published Online: November 5, 2013
... an inherent trade-off between thermal management and overall throughput. Results presented in this paper are expected to help in developing a firm understanding of thermal management in nanoimprint lithography, which may lead to technological solutions for addressing such trade-offs. Experimental validation...
