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Keywords: photodetectors
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Journal Articles
Article Type: Special Section: Micromanufacturing
J. Manuf. Sci. Eng. June 2008, 130(3): 031104.
Published Online: May 5, 2008
... sensitivity of the metal embedded microring sensor was 24.2 pm ∕ ° C . 14 09 2007 17 01 2008 05 05 2008 design engineering electromagnetic interference manufacturing processes manufacturing systems metals optical films photodetectors resonators thermomechanical treatment thin...