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Keywords: photolithography
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Journal Articles
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030911.
Published Online: June 3, 2010
... during scratching. A two-step photolithography process was used to achieve the structures on a thermally oxidized silicon wafer. In the first step of photolithography, a 3   μ m wide line pattern was defined, and e-beam evaporation of 50 Å of titanium (as an adhesion layer) followed by 150...
Journal Articles
Article Type: Technical Briefs
J. Manuf. Sci. Eng. June 2008, 130(3): 034501.
Published Online: May 2, 2008
... of a sintered alumina tool insert using a physical vapor deposition and photolithography technique. An empirical formula that shows Seebeck coefficient of a TFT depends on electrical resistance of the TFT circuit was established. Three different types of tools in number and size of TFTs were developed...
Journal Articles
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2006, 128(3): 723–729.
Published Online: November 23, 2005
... of silicon, a nanomachining cantilever with a pyramidal diamond tip was developed using a combination of photolithography and hot-filament chemical vapor deposition. Nanomachining experiments on silicon using the cantilever are demonstrated under various machining parameters. The silicon surface can...
Journal Articles
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2003, 125(3): 564–576.
Published Online: July 23, 2003
... by the Manufacturing Engineering Division for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING . Manuscript received July 2001; revised Nov. 2002. Associate Editor: Y. Lawrence Yao. 01 July 2001 01 Nov 2002 23 07 2003 glass fibre reinforced plastics photolithography...