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Keywords: single-crystal silicon
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2022, 144(4): 041013.
Paper No: MANU-21-1127
Published Online: October 19, 2021
... nanochannels on single-crystal silicon, to investigate the subsurface damage mechanism of the hard–brittle material during ductile machining. The material removal state, morphology, and dimensions of the nanochannel, and the effect of subsurface damage on the scratch outcomes were studied. The materials were...
Journal Articles
Noritaka Kawasegi, Noboru Takano, Daisuke Oka, Noboru Morita, Shigeru Yamada, Kazutaka Kanda, Shigeto Takano, Tsutomu Obata, Kiwamu Ashida
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2006, 128(3): 723–729.
Published Online: November 23, 2005
...Noritaka Kawasegi; Noboru Takano; Daisuke Oka; Noboru Morita; Shigeru Yamada; Kazutaka Kanda; Shigeto Takano; Tsutomu Obata; Kiwamu Ashida This paper investigates nanomachining of single-crystal silicon using an atomic force microscope with a diamond-tip cantilever. To enable nanomachining...
