In this article, the design and development of a biaxial tensile test device and its specimen are described. The device, which was designed for evaluating the mechanical characteristics of a thin film specimen under in-plane uniaxial and biaxial tensile stress states, consists of four sets of a piezoelectric actuator, a load cell, a linear variable differential transformer (LVDT), and an actuator case including lever structures with displacement amplification function. The structures fabricated by wire electrical discharge machining are able to amplify the actuator’s displacement by a factor of 3.8 along the tensile direction. The biaxial test specimen prepared using conventional micromachining processes is composed of a cross-shaped film section and chucking parts supported by silicon springs. After square holes in four chuck parts are respectively hooked with four loading poles, the film section is tensioned to the directions where the poles get away from the center of the specimen. Tensile strain rate can be individually controlled for each tensile direction. Raman spectroscopic stress analyses demonstrated that the developed biaxial tensile test device was able to accurately apply not only uniaxial but also biaxial tensile stress to a single-crystal silicon (SCS) film specimen.
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e-mail: namazu@eng.u-hyogo.ac.jp
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January 2012
Research Papers
Design and Development of a Biaxial Tensile Test Device for a Thin Film Specimen
Takahiro Namazu,
Takahiro Namazu
Associate Professor
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
e-mail: namazu@eng.u-hyogo.ac.jp
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan; PRESTO, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
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Yuji Nagai,
Yuji Nagai
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Nobuyuki Naka,
Nobuyuki Naka
Semiconductor Systems R&D Department, HORIBA, Ltd., 2 Miyanohigashi, Kisshoin, Minami-ku, Kyoto, Kyoto 601-8510,
Japan
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Nozomu Araki,
Nozomu Araki
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Shozo Inoue
Shozo Inoue
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Takahiro Namazu
Associate Professor
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan; PRESTO, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
e-mail: namazu@eng.u-hyogo.ac.jp
Yuji Nagai
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
Nobuyuki Naka
Semiconductor Systems R&D Department, HORIBA, Ltd., 2 Miyanohigashi, Kisshoin, Minami-ku, Kyoto, Kyoto 601-8510,
Japan
Nozomu Araki
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
Shozo Inoue
Department of Mechanical and Systems Engineering, Division of Mechanical Systems,
University of Hyogo
, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
J. Eng. Mater. Technol. Jan 2012, 134(1): 011009 (8 pages)
Published Online: December 8, 2011
Article history
Received:
May 23, 2011
Revised:
October 21, 2011
Online:
December 8, 2011
Published:
December 8, 2011
Citation
Namazu, T., Nagai, Y., Naka, N., Araki, N., and Inoue, S. (December 8, 2011). "Design and Development of a Biaxial Tensile Test Device for a Thin Film Specimen." ASME. J. Eng. Mater. Technol. January 2012; 134(1): 011009. https://doi.org/10.1115/1.4005348
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