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Keywords: Raman spectroscopy
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Eng. Mater. Technol. January 2012, 134(1): 011009.
Published Online: December 8, 2011
... spectra semiconductor thin films silicon stress analysis tensile testing biaxial tensile test thin film single-crystal silicon Raman spectroscopy By virtue of rapid progress of semiconductor fabrication technologies, micro devices, such as integrated circuits...
