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Keywords: micromechanical devices
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Journal Articles
Article Type: Predictive Science And Technology In Mechanics And Materials
J. Eng. Mater. Technol. October 2009, 131(4): 041208.
Published Online: September 1, 2009
... of theoretical frameworks, assessment of model predictive capabilities, and discovery of new physical phenomena. 24 02 2009 10 06 2009 01 09 2009 carbon nanotubes design of experiments elasticity micromechanical devices microswitches nanowires plasticity thin films...
Journal Articles
Article Type: Research Papers
J. Eng. Mater. Technol. January 2009, 131(1): 011002.
Published Online: December 15, 2008
... micromechanical devices plasticity surface roughness tensile strength work hardening asperity microcontacts rf MEMS crystal plasticity dislocation density finite-element modeling Microelectromechanical system (MEMS) devices, particularly those with radio frequency (rf) applications, have...
Journal Articles
Article Type: Special Section On Nanomaterials And Nanomechanics
J. Eng. Mater. Technol. October 2005, 127(4): 451–456.
Published Online: February 22, 2005
... grain size electron backscattering electron diffraction hardness micromechanical devices particle reinforced composites Characterization of the mechanical properties of metal thin films used in the microelectronics industry and in microelectromechanical systems has been the subject...
Journal Articles
Article Type: Technical Papers
J. Eng. Mater. Technol. January 2005, 127(1): 16–22.
Published Online: February 22, 2005
... 14 September 2004 22 02 2005 nickel metallic thin films bending micromechanics micromechanical devices plasticity plastic deformation stress-strain relations fatigue testing fatigue fracture mechanics internal stresses In recent years, there has been considerable...
Journal Articles
Article Type: Research Papers
J. Eng. Mater. Technol. January 2005, 127(1): 90–96.
Published Online: February 22, 2005
.... Manuscript received January 27, 2004; revision received June 23, 2004. Review conducted by: A. Pelegri. 27 January 2004 23 June 2004 22 02 2005 silicon elemental semiconductors semiconductor thin films micromechanical devices plastic deformation failure (mechanical) creep...
Journal Articles
Article Type: Technical Papers
J. Eng. Mater. Technol. October 2003, 125(4): 361–367.
Published Online: September 22, 2003
... hardness indentation silicon atomic force microscopy substrates insulating thin films porous materials spin coating hardness testing micromechanical devices nanocomposites MEMS are integrated micro devices combining electrical and mechanical components. They are fabricated using...