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Keywords: microscribing processClose
Article Type: Research Papers
J. Eng. Mater. Technol. January 2008, 130(1): 011002.
Published Online: December 20, 2007
... brittleness cutting ductile-brittle transition elemental semiconductors micromachining plastic deformation sapphire semiconductor technology silicon critical depth of cut specific cutting energy microscribing process hard and brittle materials Scribing process is often applied before...