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Keywords: masks
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. January 2011, 133(1): 011001.
Published Online: December 29, 2010
...Anupam Saxena Previous versions of the material mask overlay strategy (MMOS) for topology synthesis primarily employ circular masks to simulate voids within the design region. MMOS operates on the photolithographic principle by appropriately positioning and sizing a group of negative masks and thus...