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Keywords: photolithography
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. January 2011, 133(1): 011001.
Published Online: December 29, 2010
... in the MMOS based topology design algorithms. 15 03 2010 01 11 2010 29 12 2010 29 12 2010 beams (structures) design engineering elasticity iterative methods masks minimisation photolithography topology A fundamental objective of a single-piece and single material...