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Keywords: vibration isolation
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. September 2009, 131(9): 091002.
Published Online: August 17, 2009
... the optimal operating environment for the attached device that requires vibration isolation. An active micromachined vibration isolator can be realized by combining a state sensor, and electrostatic actuator and feedback electronics with the passive isolator. Using this approach, a prototype active...