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Patrick Abgrall
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Proceedings Papers

Fabrication of Nanochannels on Polymer Thin Film

Vinh-Nguyen Phan, Patrick Abgrall, Nam-Trung Nguyen, Peige Shao, Jeroen Anton Van Kan
Proc. ASME. ICNMM2009, ASME 2009 7th International Conference on Nanochannels, Microchannels and Minichannels, 921-925, June 22–24, 2009
Paper No: ICNMM2009-82057
DOI: https://doi.org/10.1115/ICNMM2009-82057
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Topics: Manufacturing, Polymers, Thin films, Bonding, Embossing, Atomic force microscopy, Pressure, Reactive-ion etching, Temperature, Dimensions
Proceedings Papers

Fabrication of Nanochannels in Silicon and Polymers

Nam-Trung Nguyen, Patrick Abgrall
Proc. ASME. MNHT2008, ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer, Parts A and B, 113-118, June 6–9, 2008
Paper No: MNHT2008-52063
DOI: https://doi.org/10.1115/MNHT2008-52063
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Topics: Bonding, Embossing, Manufacturing, Polymers, Reactive-ion etching, Silicon, Dimensions, Etching, Glass, Glass transition