Previous experimental work has shown that negative fluid pressure does develop at the disk/pad interface during chemical mechanical polishing. However, these studies dealt with one-dimensional measurement and modeling. To better understand the problem, two-dimensional pressure mapping is carried out. In addition, the orientation of the disk is measured with a capacitive sensing technique. Results reveal a large negative pressure region at the disk/pad interface that is skewed toward the leading edge of the disk. The disk is also found to be leaning down toward the leading edge and toward the center of the pad. A mixed-lubrication model based on the Reynolds equation and taking into account the disk orientation angles has been developed. Modeling and experimental results show similar trends, indicating the tilting of the disk as a dominant factor in causing the negative pressure phenomenon.
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January 2005
Technical Papers
Tilt and Interfacial Fluid Pressure Measurements of a Disk Sliding on a Polymeric Pad
Sum Huan Ng,
Sum Huan Ng
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
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Len Borucki,
Len Borucki
Intelligent Planar, Mesa, AZ 85205
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C. Fred Higgs, III,
C. Fred Higgs, III
Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213
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Inho Yoon,
Inho Yoon
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
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Andre´s Osorno,
Andre´s Osorno
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
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Steven Danyluk
Steven Danyluk
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
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Sum Huan Ng
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
Len Borucki
Intelligent Planar, Mesa, AZ 85205
C. Fred Higgs, III
Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213
Inho Yoon
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
Andre´s Osorno
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
Steven Danyluk
George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
Manuscript received February 25, 2004; revision received May 28, 2004. Review conducted by: J. Tichy.
J. Tribol. Jan 2005, 127(1): 198-205 (8 pages)
Published Online: February 7, 2005
Article history
Received:
February 25, 2004
Revised:
May 28, 2004
Online:
February 7, 2005
Citation
Ng, S. H., Borucki, L., Higgs, C. F., III, Yoon , I., Osorno , A., and Danyluk, S. (February 7, 2005). "Tilt and Interfacial Fluid Pressure Measurements of a Disk Sliding on a Polymeric Pad ." ASME. J. Tribol. January 2005; 127(1): 198–205. https://doi.org/10.1115/1.1829718
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