Surface characterization, particularly roughness analysis, is very important for a wide range of applications including wear assessment. This paper proposes a set of methods and techniques to acquire appropriate images using confocal laser scanning microscopy, to separate roughness, waviness, and form using wavelet theory, and to characterize surface roughness for engineering surfaces and surfaces of small particles. Two application examples on engineering surfaces and wear particles have been presented in the paper to demonstrate that the method developed in this study can be used to measure surface roughness reliably and precisely. A guide on how to determine the iris size, step size, and objective lens has been scientifically provided according to theoretical analysis and experimental results.
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