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Keywords: capacitive sensors
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Technical Papers
J. Tribol. January 2005, 127(1): 198–205.
Published Online: February 7, 2005
... sorption lubrication capacitive sensors sliding friction mechanical contact Chemical mechanical polishing (CMP) is fast becoming the established technology in the planarization of sub-0.5 μm integrated circuit devices. Its applications include interlayer dielectric (ILD) planarization...
