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Journal Articles

Solution of Reynolds Equation in Polar Coordinates Applicable to Nonsymmetric Entrainment Velocities

Kurt Beschorner, C. Fred Higgs, III, Michael Lovell
Journal: Journal of Tribology
Publisher: ASME
Article Type: Technical Briefs
J. Tribol. July 2009, 131(3): 034501.
https://doi.org/10.1115/1.3118783
Published Online: May 22, 2009
...Kurt Beschorner; C. Fred Higgs, III; Michael Lovell Reynolds equation in polar cylindrical (polar) coordinates is used for numerous tribological applications that feature thin fluid films in sliding contacts, such as chemical mechanical polishing and pin-on-disk testing. Although unstated...
View Article titled, Solution of Reynolds Equation in <span class="search-highlight">Polar</span> <span class="search-highlight">Coordinates</span> Applicable to Nonsymmetric Entrainment Velocities
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Topics: Disks, Navier-Stokes equations, Polishing, Pressure, Semiconductor wafers